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nh3 Density Monitors for powergrid

nh3 Density Monitors for powergrid

One way to increase density and reduce the amount of hydrogen in PECVD silicon nitride is to use N2 as a reactant instead of NH3(34). The hydrogen content of nitride films deposited with N2 at 250-300 C is three times lower than that deposited with ammonia under similar conditions.

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