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  • Takanori Iijimas research works | Toshiba Corporation

    Takanori Iijimas 6 research works with 52 citations and 181 reads, including: Hybrid Thermofluid Simulation with Chemically Non-Equilibrium and Equilibrium Calculations for Decaying SF 6 Arcs

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  • US5354417A - Etching MoSi2 using SF6, HBr and O2 -

    A process for selectively etching a substrate 20 having a molybdenum silicide layer 25 with a resist material 26 on portions of the molybdenum silicide layer 25 is described. The substrate 26 is placed into an etch zone 54 and the process gas comprising SF 6 and HBr is introduced into the etch zone 54. Preferably, the volumetric flow ratio of SF 6Cited by: 61

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  • Enabling DRIE processes for high potential MEMS

    Enterprise Solutions Space Solutions Transport Solutions Integration Services Alcatel Micro Machining System (AMMS) SF6 << 1 while [Polymer/ Si]O2 1 C4F8 Plasma SF6 Plasma O2 Plasma 0 2 4 6 8 10 12 14 0 2040 6080 100 ¦ Bias Voltage¦ (V) Toshiba. www.adixen.com. Title: Microsoft PowerPoint - AVS-PEUG-12-10

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  • SF6 gas Mixtures Storage for subway

    Special SF6 solutions – Synergy Power Systems. Used SF6 gas containing an unacceptably high percentage of nitrogen and air can be prepared by DILO Separating plants to the desired quality. It can then be reused in gas compartments and consequently, costs for storage, disposal, transportation and the expense for new gas can be minimised. The purity degree of the prepared SF6toshiba

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  • US6555476B1 - Silicon carbide as a stop layer in

    US6555476B1 US09/217,123 US21712398A US6555476B1 US 6555476 B1 US6555476 B1 US 6555476B1 US 21712398 A US21712398 A US 21712398A US 6555476 B1 US6555476 B1 US 6555476B1 Authority US United States Prior art keywords silicon silicon carbide layer forming trenches Prior art date 1997-12-23Cited by: 27

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  • hexafluoride Grid Solutions dilo

    Global Sulfur Hexafluoride (SF6) Circuit Breaker Market. Global Sulfur Hexafluoride (SF6) Circuit Breaker Market Report 2021 Forecast, Opportunities and Strategies : COVID 19 Impact and Recovery Top Key Players GE Grid Solutions, Siemens, Hitachi HVB, Schneider, Mitsubishi Electric, ABB, Toshiba, Hyosung Corporation, TKPE,

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  • Daiichi Nekken Co., Ltd. - o2-analyzer.com

    Nov.1972 Founded as an engineering company of energy-saving products by CEO Masayoshi Nakagawa. Feb.1973 As a part of business, aimed at its future of Oxygen analyzers for exhaust gas started importing and selling of Oxygen analyzers. Took the initiative in spreading maintanance-free Oxygen analyzers in the country.

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  • [DOC]
  • TOP-DOWN TECHNIQUES TO FABRACATE

    Web viewThe 45 nm Si/SiGe bilayer is etched using Reactive Ion Etching (RIE) with an SF6 :O2 30:10 sccm mixture at a pressure of 40 mTorr and a power density of 0.1 W/cm2 [31]. The “positive” mask consisted of Al lines can transfer patterns into the substrate with a minimum line width of about 60 nm (Fig.3 (a)).

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  • ISSM 2018 - PROGRAM SCHEDULE - semiconportal.com

    PC-O-67 : Real-time Etch Control to Reduce First Wafer Effect in SF6/O2/Ar Plasma Sangwon Ryu, Seoul National University: 16:40: PC-O-66 : Prediction of the Number of Defects in Image Sensors by VM using Equipment QC Data Toshiya Okazaki, Sony Semiconductor: 17:00: FD-O-17 : Trailer based rail monitoring in overhead hoist

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  • China Sensors, Sensors Manufacturers, Suppliers, Price

    China Sensors manufacturers - Select 2021 high quality Sensors products in best price from certified Chinese Sensor manufacturers, Temperature Sensor suppliers, wholesalers and factory on Made-in-China.com

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  • Integration of Disruptive Materials for Advanced Non

    Solutions for NVM Memory Development Process Module Blocks www.telefunkensemi.com Summary 2. Samsung 17nm MTJ Nantero NRAM Toshiba MTJ. Resistive RAM SPECIALIZED FOUNDRY SERVICES O2,SF6,He,O2 Chamber B (250C): DSQ O2, H20 BCl3,Cl2, Ar Chamber B (65C):

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  • SF6-alternative gases for application in gas-insulated

    Mar 20, 2018Sulfur hexafluoride (SF 6 ), which is the preferred gas for use in gas-insulated switchgear (circuit breakers, disconnect switches, etc. for high-voltage electrical circuits), has a very high global warming potential, and there is a large international effort to find alternative gases. Recently, this effort has made

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  • sf 6 Gas Mixture Transmitter for railroad

    best sf 6 gas o2 gas leak detector. best SF 6 gas o2 gas leak detector.BW Technologies QT-XWHM-R-Y-NA GasAlertQuattro 4-Gas Detector with Rechargeable Battery, Combustible, O2, H2S and CO, Yellow 4.6 out of 5 stars 4 $679.87 $ 679 . 87 $778.00 $778.00Best Sf6 O2 Gas Leak DetectorResults neartoshiba

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  • sf6 gas gas maintenance cost

    Replacing SF6 with dry air reduces operational cost. Mar 05, 2019Evaluating SF6 alternatives. PGE have conducted a market analysis of available alternatives of SF6 and, after suppliers were invited to take part in the request for information, the company ended up with 3 solutions for high voltage gas insulated switchgear

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  • Martijn Tibbe - Product Specialist - Ecare | LinkedIn

    Subsequently, a solution of PDMS : hexane at a 1 : 10 ratio was spin-coated over these fabricated arrays. The cured PDMS membrane was etched in a plasma mixture of sulfur hexafluoride (SF6) and oxygen (O2) to open the through-holes.Title: Product Specialist | PhD

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  • China Gas Detector manufacturer, Gas Transmitter,

    China Gas Detector supplier, Gas Transmitter, Online Sf6 Gas Detector Manufacturers/ Suppliers - Henan Zhiyi System Engineering Co., Ltdtoshiba

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  • Spare parts. | SemiStar

    MFC Mass Flow Controller 200SCCM O2: FC-D980C: AERA: MFC Mass Flow Controller 200SCCM SF6: FC-D980C: AERA: MFC Mass Flow Controller 100SCCM SF6: FC-D980C: AERA: MFC Adapter Module Digital-Analog: CA-n98D: AERA: MFC Mass Flow Controller 10SLM O2: FC-981C: AERA: MFC Mass Flow Controller 10SLM O2…

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  • Si/SiGe HBTs for application in low power ICs -

    Apr 01, 1996The undercut of the emitter mask results in a self-aligned base metallization also structured in a lift-off process. After the lift-off of the collector con- tact, metal air bridges are etched in an isotropic SF6/O2 plasma in order to reduce the parasitic el- ements.

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  • YASKAWA AC Drive-V1000

    YASKAWA AC Drive-V1000 Compact Vector Control Drive Technical Manual MANUAL NO. SIEP C710606 18F Models: 200 V

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  • Toshiba, committed to ‘Make in India’ and ‘Export from

    Please tell us about TTDI, especially the position of Toshiba’s energy solution business, and the products that the company offers. Toshiba is a market leader with expertise in end-to-end energy management systems and solutions including Power Generation, Transmission Distribution and Power Storage.

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  • Sensors | Sensing and Inernet of Things | Honeywell

    Complete board mount or heavy duty pressure measurement solutions; easily configurable with wide choice of ports, connectors, outputs, pressure ranges. Pulse Oximetry Sensors. Pulse oximetry sensors that are available with resuable and disposable options. Easy handling and optimal cleaning and disinfection.

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  • Possibility of realizing new structures with inner fine

    Jul 02, 1995Although the solution is a known etchant for aluminum, the Al of the samples was not etched because the very near surface was covered by stable AlF3. The etching depth of InP before the regrowth was estimated to be less than 0022-0248/95/$09.50 1995 Elsevier Science B.V.

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  • Facility introduction // NIMS Namiki Foundry

    Measurement Functions: height mapping, surface roughness, film thckness of transparent film: Magnifications: x10, x20, x50, x150(objective lens) / x200,x400,x1000

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  • Minutes of Meeting Marriott Downtown, Kansas City,

    Make an overview of available SF6-free technologies and their associated physical properties. Environmental (LCA) Performance Standard methodology by ISO for LCA Life Cycle Assessment. Define assumptions, sample calculations. This is a holistic approach to environmental performance based on total CO2toshiba

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  • Selective titanium nitride etching - Applied Materials, Inc.

    “A Study of CD Budget in Spacer Patterning Process”, Toshiba, SPIE 2008, Feb. 26, 2008, 12 pages. Musaka, “Single Step Gap Filling Technology fo Subhalf Micron Metal Spacings on Plasma Enhanced TEOS/O2 Chemical Vapor Deposition System,” Extended Abstracts of the 1993 International Conference on Solid State Devices

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  • Linear Accelerator Parts - Avante Health Solutions

    Types of Parts. OEM Parts: Avante stocks new parts from Varian, Elekta, Siemens and other top manufacturers – all parts are backed by the OEM warranty.; OEM Equivalent Parts: New parts, frequently from the same source asthe OEM and backed by the industrys longest warranty.; Certified Refurbished Parts: Similar to OEMs, Avante

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  • Investigation of partial discharge mechanism by

    Broad band pulse detection studies of corona and breakdown in air, N2, O2, CO2, SF6 and SF6-N2 mixture. Gaseous Dielectrics 1987;V:637Â 642. AUTHORS (from left to right) Masanobu Yoshida (student member) completed the first term of the doctoral program at Nagoya University in 1997 and then joined Chubu Electric

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  • Three-Dimensional Integration of Semiconductors -

    Kenji Takahashi is a Chief Specialist at Memory Packaging Development Department, Memory Division, Semiconductor Strage Company, Toshiba Corporation. He received a M.E. Degree of from Chemical Engineering at the University of Tokyo in 1984 and Ph.D. from Information Science and Electrical Engineering at Kyushu

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  • Super‐atmospheric pressure ionization mass

    A sample solution was pumped through the ESI capillary using a syringe pump with high linear force (PHD 4400, Harvard Apparatus, MA), and the typical flow rate of the sample solution was 4 µl/min. In this prototype, a custom made ion transport tube with an inner diameter of 0.25 mm and length of 66 mm was used to couple the

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  • Thiết bị đóng cắt điện Circuit breakers CB | ANH TY

    Medium-voltage circuit breakers: Vacuum circuit breakers, Air circuit breakers, SF6 circuit breakers. 6. High-voltage circuit breakers: Bulk oil, Minimum oil, Air blast, Vacuum, SF6, C, O2. 7. Sulfur hexafluoride (SF6) high-voltage circuit breakers. 8. Disconnecting circuit breaker (DCB). 9. Carbon dioxide (CO2) high-voltage circuit

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  • Buy Now - New emt SF6MPU5US SF6 Gas Analyser

    Multi SF6 Gas analyser • The world’s 1st 5 Gas SF6 Breakdown Analyser • Simple and easy “connect and go” technology. • Unique easy to use software pre=programmed with all relative global industry methods (CIGRE/IEC) built in • Unique “traffic light” pass/fail indication on screen, fully data-logged.

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  • Selective etch of silicon nitride - Applied Materials, Inc.

    “A Study of CD Budget in Spacer Patterning Process”, Toshiba, SPIE 2008, Feb. 26, 2008, 12 pages. Nishino, et al.; Damage-Free Selective Etching of SI Native Oxides Using NH3/NF3 and SF6/H20 Down-Flow Etching, The Japanese Society of Applied Physics, vol. 74, No. 2, pp. 1345-1348, XP-002491959, Jul. 15, 1993.

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  • High performance 3-folded symmetric decoupled

    High performance 3-folded symmetric decoupled MEMS gyroscopes. 2012. Hani Tawfik

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  • CORROSION RESISTANCE | Professor Dr. Loutfy H

    A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication Hong Shih Etch Products Group, Lam Research Corporation, Fremont,

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  • B. Jayant Baliga Papers, 1984-2002 | NC State

    Mobility Study on RIE Etched Silicon Surfaces Using SF6/O2 Gas Etchants / by Tsengyou Syau, B. Jayant Baliga 1992 (TR-92-014) Box 1, Folder 3 Comparison of Ultralow Specific On-Resistance UMOSFET Structures: The ACCUFET, EXTFET, INVFET, and Conventional UMOSFETs / by Tsengyou Syau, Prasad Venkatraman,toshiba

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  • Linear Accelerator Parts - Avante Oncology - Avante

    View our selection of Linear Accelerator parts, including flow switches, hoses, motors, wedge trays, hydraulic actuators, and brackets.

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